Lab

实验室照片:

CVD Furances

(1)Tube furnace 1: Thermcraft (USA) 4 in., 1200(0C), Constant T(L>70 cm)

(2)Tube furnace 2: Anhui Beyke, with slider rail, 3 in., 1200 (0C), two T zone

(3)Tube furnace 3: Hefei Kejing: 1 in., 1200 (0C), Constant T(L>10 cm)

(4)Tube furnace 4: Hefei Kejing, 2 in., 1200 (0C), two T zones, (L>10 cm)

Fabrication of mircondevice

Ultrasonic Cleaner/超声波清洗机

Chemical hood/通风橱

Lab Tables/实验台

Spin coater/匀胶机:WS-650(No 1),Chinese(No 2)

Deionized Water/超净水仪:Kertone-LAB MINI8-UVF;

Plasma #1/等离子机1: Germany HARRICK (Three grades power); 

Plasma #2/等离子机2: 沈阳科晶(Current adjustable 电流连续可调);

Optical Mircoscope: LV150 (Long work distance 超长工作距离);

Ultrasonic Golden Wire Ball Welding Machine/超声波金丝球焊机: 伟天星WT2330;

Nanomainpulator/纳米操纵手: Germany Kleindick;

Thermal evaporator/热蒸镀仪: GSL-1800X-ZF4;

 Photolithography/光刻: UV Lamp Exposure/紫外灯曝光(365nm, SPECTRONICS FC-100);

Mirco Transfer Station/微米转移台:2 sets(Alignment:1um, 4d, DIY);

Vacuum Dry Oven/真空干燥箱:2 Sets (Shanghai Yiheng, BPZ-6063LZ).

Measurment

Kethely 4200: Three Channels: 0.01fA, 210V;

Screening Box/自制屏蔽盒(有测试座、带磁场0.5T)3 Boxes;

Oscilloscope/示波器 2 sets;

Funcational Generator信号发生器 2 sets;

Lock-in Amplifier/锁相放大器:Stanford  SR830 and SR850;

Pre-amplifier/前置放大器:Stanford SR560 and SR570;

Source meter/源表: Keithley 2611A  2612A;

Delta Measurement Meter/测量源表:Keithley 6221 and 2182A(2套);

Molecular Pump #1/分子泵机组1:Edwards(EXT 75DX) ;

Probe Station/探针台: 深圳鑫志尚SM-4;

Refrigerator #1/制冷机1: (He gas) HC-4E (Japanese);

Refrigerator #2/制冷机2: (He gas) 国产的索尔文(Chinese);

Refrigerator #3/制冷机3:(液氮)DIY/自制;

Molecular Pump #2/分子泵机组2: TurboVac(350ix).

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